SiC CVD Epitaxial Growth Lab

• 2 state-of-the-art CVD systems: Emcore Discovery 75 vertical-flow system and Aixtron 200/4HT horizontal-flow system.
• Accommodate a single wafer up to 3" in diameter, or multiple smaller wafers.
• Operate at low growth pressures at growth temperatures of 1600° C.
• Achieved growth rate of 4 µm/hr.