Microsystems Fabrication Clean Room
2000 Square Foot Class 1000 Cleanroom
STS ICP and RIE Deep Etcher
6 Sputtering Rigs with High Temperature Capability
3 Evaporation Rigs with High Temperature Capability
2 Mask Aligner
2 Wet Chemical Stations.
Surface profilometer
Overview
Microsystems Fabrication Clean Room
SiC CVD Epitaxial Growth Lab
Microdevices Characterization Facilities
Controls Development and Simulation Lab
Piloted Control Evaluation Facility
Real-time Vehicle Health Management Testbed
Actuator Development Lab
responsible official
site maintenance
mary zeller
edmond wong
