Facilities Instrumentation and Controls Division
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Microdevices Characterization Facilities

lab photo

  • Atomic Force Microscope (AFM)
  • Scanning Electron Microscope with EDAX.
  • Scanning Auger Electron Spectroscopy
  • X-ray Photoelectron Spectroscopy (XPS)



Overview
Microsystems Fabrication Clean Room
SiC CVD Epitaxial Growth Lab
Microdevices Characterization Facilities
Controls Development and Simulation Lab
Piloted Control Evaluation Facility
Real-time Vehicle Health Management Testbed
Actuator Development Lab
responsible official
site maintenance
 mary zeller
 edmond wong