Facilities Instrumentation and Controls Division
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Our Facilities

Microsystem Development Facilities

  • Microsystems Fabrication Clean Room
  • SiC CVD Epitaxial Growth Lab
  • Microdevices Characterization Facilities

Controls and Dynamics Facilities

  • Controls and Dynamic Simulation Lab
  • Piloted Control Evaluation Facility
  • Real-time Vehicle Health Management Testbed
  • Actuator Development Lab



Overview
Microsystems Fabrication Clean Room
SiC CVD Epitaxial Growth Lab
Microdevices Characterization Facilities
Controls Development and Simulation Lab
Piloted Control Evaluation Facility
Real-time Vehicle Health Management Testbed
Actuator Development Lab
responsible official
site maintenance
 mary zeller
 edmond wong