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Structures and Materials Division Research and Technology Directorate NASA Glenn Research Center

Analytical Science Group
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Electron Optics
Electron Microprobe
The Electron Microprobe Facility at NASA Glenn is equipped with a scanning electron microprobe which can analyze elements from Be through U with sensitivities ranging from 100% to 50PPM. The microprobe is typically used for detailed microchemical analysis.

Sample images from scanning electron microscopes
 
Above: Quantitative elemental maps
 

Instrumentation
JEOL 8200 Super Probe
  • Five two-crystal WDX spectrometers
  • Analysis Be-U with 100% to 50PPM sensitivity
  • 1-2% relative analytical accuracy
  • 1.0 micron spatial resolution
  • Typical analysis time 10s for major components and 300s for trace components
  • Simulataneous EDX-WDX quantitative analysis
Sample images from scanning electron microscopes
 
Above: Technician operating the JEOL 8200 Electron Probe.
 
Examples
For further information please contact Laura Evans
Examples
Microprobe Example
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Last Updated: April 5, 2013