- G. Beheim and C. S. Salupo, "Deep RIE Process for Silicon Carbide Power Electronics and MEMS", in Materials Research
Society Symposia Proceedings, vol. 622, Wide-Bandgap Electronic Devices, R. J. Shul, F. Ren, M. Murakami, and W. Pletschen, Eds. Warrandale, PA:
Materials Research Society, 2000. [Paper (748 KB PDF File)]
- Robert S. Okojie, Glenn M. Beheim, George J.Saad, and Ender Savrun, "Characteristics of Hermetic 6H-SiC Pressure Sensor
at 600 C, AIAA Space 2001 Conference and Exposition, Albuquerque, NM, August 28-30, 2001 (AIAA Paper No. 2001-4652). [Paper (1.4 MB PDF File)]
- Robert S. Okojie, Andrew R. Atwell, Kevin T. Kornegay, Scott. L. Roberson and Alain Beliveau, "Design Considerations for
Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometers," Technical Digest of the 15th IEEE International Conference on MEMS, Las Vegas, NV,
Jan. 20-24, 2002. p. 618-622. (IEEE cat. # 02CH37266). [Paper (5.6 MB PDF File)]
- R. S. Okojie, G. C. Fralick, G. J. Saad, C. A. Blaha, J. J. Adamczyk, and J. M. Feiereisen, "A Single Crystal SiC
Plug-and-Play High Temperature Drag Force Transducer", Digest of Technical Papers for Transducers '03, The 12th International Conference on Solid State
Sensors, Actuators and Microsystems, Boston, MA June 8-12, 2003. p 400-403 (IEEE Catalog Number 03TH8664C).
[Paper (760 KB PDF File)]
- E. Savrun, V. Nguyen, R. Okojie, and C. Blaha, "Accelerated Stress Testing of SiC MEMS-DCA Pressure Transducers", 2004 IMAPS International High Temperature Electronics Conference, Santa Fe, NM, May 18-20, 2004.
[Paper (760 KB PDF File)]
- R. S. Okojie, E. Savrun, P. Nguyen, V. Nguyen, and C. Blaha, "Reliability Evaluation of Direct Chip Attached Silicon Carbide Pressure Transducers", 3rd International Conference on Sensors, Vienna, Austria, October 24-27, 2004.
[Paper (472 KB PDF File)]
- L. J. Evans and G. M. Beheim, "Deep Reactive Ion Etching (DRIE) of High Aspect Ration SiC Microstructures Using a Time-Multiplexed Etch-Passivate Process," in Materials Science Forum, vol. 527-529, Silicon Carbide and Related Materials 2005, R. P. Devaty, D. J. Larkin, and S. E. Saddow, Eds. Switzerland: Trans Tech Publications, 2006, pp. 1115-1118. [Paper (1.2 MB PDF File)]
- G. M. Beheim and L. J. Evans, "Control of Trenching and Surface Roughness in Deep Reactive Ion Etched 4H and 6H SiC," in Materials Research Society Symposium Proceedings, vol. 911, Silicon Carbide 2006 - Materials, Processing and Devices, T. Kimoto, M. Capano, M. Dudley, A. R. Powell, and S. Wang, Eds. Warrendale, PA: Materials Research Society, 2006, pp. 329-334. [Paper (464 KB PDF File)]
- R. S. Okojie, S. M. Page, and M. Wolff, "Performance of MEMS-DCA SiC Pressure Transducers under Various Dynamic Conditions," 2006 IMAPS International High Temperature Electronics Conference, Santa Fe, NM, May 15-18, 2006, p. 70-75. [Paper (376 KB PDF File)]
- R. S. Okojie, P. Nguyen, V. Nguyen, E. Savrun, D. Lukco, J. Buehler, T. McCue, and S. Knudsen, "Parametric Stability and Failure Mechanisms of Silicon Carbide Pressure Sensors," 2006 IMAPS International High Temperature Electronics Conference, Santa Fe, NM, May 15-18, 2006, p. 82-86. [Paper (724 KB PDF File)]
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