PVD Coatings Laboratory
The PVD Coatings Laboratory has a single gun PVD system and a dual gun PVD
system for sputtering both thin metallic and oxide coatings.
The laboratory is a dedicated research
facility used to deposit films on various materials. The deposited coatings
are used as reaction barriers, overlay coatings, and as adhesion layers for
subsequent coatings applied by other means.
Single Gun PVD System
- 2 inch diameter guns
- Sample rotation capability
- Sample size up to 2x2 inches
- RF or DC power capability up to 250 watts
Dual-Gun PVD System
- Dual 2 inch guns
- Sample size up to 2x4 inches (2 inch dia substrate)
- Sample heating to 900 oC
- RF plasma power up to 300 watts
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Contact: Dr. Jim Nesbitt